Synonyms
Tantalum Silicide (Ta5Si3) Sputtering Targets, Ta5Si3 Sputtering Target, Ta5Si3 Sputter Target, Ta5Si3 Target, Tantalum Silicide Sputtering Target, Tantalum Silicide Sputter Target, Tantalum Silicide Target
Size
Circular: Diameter<14inch, Thick >1mm; Block: Length<32inch, Width<12inch, Thick >1mm